The effect of hydrogen content on the properties of reactively sputtered amorphous SiH
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon and Solar Cell Technologies
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References (3)
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1. Brodsky · Phys. Rev. B · 1977 · 16 · 355610.1103/PhysRevB.16.3556 ↗
2. Jeffrey, F. R., Shanks, H. R. and Danielson, G. C., J. Appl. Phys. To be published.
3. Brodsky · Appl. Phys. Lett. · 1977 · 30 · 56110.1063/1.89260 ↗