Deposition of device quality a-Si:H films with the hot-wire technique
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (6)
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1. Mahan · J. Appl. Phys. · 1991 · 69 · 672810.1063/1.348897 ↗
2. Schneider · 1989 · Vol. A · 687
3. Scholz · J. Non-Cryst. Solids · 1991 · 137&138 · 25910.1016/S0022-3093(05)80105-X ↗
4. Scholz · 1993
5. Mahan · 1991 · 234 · 178
6. Schneider · Jap. J. Appl. Phys. · 1991 · 30 · 22810.1143/JJAP.30.228 ↗