Post-hydrogenation of CVD deposited a-Si films
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (8)
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2. Kaplan · Appl. Phys. Lett. · 1978 · 35 · 44010.1063/1.90370 ↗
3. Hirose · 1978 · 352
4. Dieumegard · 1978
5. Carlson · Appl. Phys. Lett. · 1978 · 33 · 8110.1063/1.90153 ↗
6. Taniguchi · 1978 · 45
7. Hasegawa · Solid State Comm. · 1979 · 29 · 1310.1016/0038-1098(79)90140-6 ↗
8. Spear · Advances in Physics · 1977 · 26 · 81110.1080/00018737700101463 ↗