journal article·1998-05

X-ray photoelectron spectra of adhesion-enhanced a-Si:H on stainless steel induced by plasma treatments

A Gheorghiu-de La Rocque, N Bertrand, P.A Bonnefont, P Bulkin, B Drévillon, C Sénémaud

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Thin-Film Transistor Technologies · Copper Interconnects and Reliability

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References (4)

Show source-provided references
1. Bertrand · Thin Solid Films · 1996 · 290 · 294
2. N. Bertrand, B. Drévillon, A. Gheorghiu, C. Sénémaud, L. Martinu, J.E. Klemberg-Sapieha, J. Vac. Sci. Technol. A, 1997, in press.
3. L. Martinu, in: R. d'Agostino (Ed.), Plasma Treatment and Deposition of Polymers, Kluwer Academic, Dordrecht, 1997, in press.
4. Sénémaud · J. Appl. Phys. · 1993 · 74 · 504210.1063/1.354286 ↗