Deposition of silicon by decomposition of silane via hydrogen abstraction
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon and Solar Cell Technologies
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References (6)
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1. S. Koynov, V. Petrova-Koch, M. Brandt, R. Hollenbach, A. Toneva, ICPS, Warsawa 1988
2. Austin · J. Phys. Chem. · 1976 · 80 · 281110.1021/j100567a001 ↗
3. H. Schmidbaur - private commun.
4. R. Hollenbach et al. - submitted to Semicond. Sci. and Technol.
5. Brandt · Diploma thesis TU München · 1989
6. N. Johnson - private commun.