Optical emission spectroscopy of silane/argon magnetron discharges
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (13)
Show source-provided references
1. Hamasaki · Appl. Phys. Lett. · 1980 · 37 · 108410.1063/1.91872 ↗
2. Taniguchi · Appl. Phys. Lett. · 1980 · 37 · 78710.1063/1.92074 ↗
3. Hamasaki · J. Phys. · 1981 · 42 · 807
4. Nakayama · Jpn. J. Appl. Phys. · 1982 · 21 · L60410.1143/JJAP.21.L604 ↗
5. de Rosny · J. Appl. Phys. · 1983 · 54 · 227210.1063/1.332381 ↗
6. 19. Fachkolloquium Informations technik
7. d'Agostino · J. Appl. Phys. · 1981 · 52 · 125910.1063/1.329748 ↗
8. Perrin · Chem. Phys. · 1982 · 67 · 16710.1016/0301-0104(82)85031-3 ↗
9. Fischer · Z. Phys. · 1933 · 86 · 64610.1007/BF01338975 ↗
10. Kushner · IEEE Trans. Plasma Sci. · 1986 · PS-14 · 18810.1109/TPS.1986.4316522 ↗
11. Coburn · J. Appl. Phys. · 1980 · 51 · 313410.1063/1.328060 ↗
12. Ecke · Exp. Techn. Phys. · 1982 · 30 · 347
13. Tachibana · 1985