Confocal laser scanning microscopy of active color centers based strips induced on LiF by low energy electron beams

Abstract A confocal laser scanning microscope has been used in a non-conventional approach to reconstruct the depth distribution of stable, optically active color centers induced at the surface of a lithium fluoride crystal by a low energy electron beam. The formation of F2 and F 3 + aggregate electronic defects was limited to the penetration depth of the electrons in the material, as obtained from Monte Carlo simulations. This novel measurement technique could be easily used for spatial characterization of luminescent optical waveguides in transparent dielectrics.