Growth of amorphous zinc phosphide films by reactive radio frequency sputtering
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and interfaces · Chalcogenide Semiconductor Thin Films
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References (9)
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4. Rao · J. Mater. Sci. · 1985 · 20 · 327710.1007/BF00545195 ↗
5. Hultgren · 1973
6. Greenberg · J. Chem. Thermodyn. bf · 1974 · 6 · 100510.1016/0021-9614(74)90223-7 ↗
7. Gadzhiev · 1980 · 259
8. J. E. Palmer et al. to be published.
9. Persin · Fizika bf · 1986 · 18 · 363