Electron energy-loss spectroscopy in irradiation-sensitive rutile-GeO2

Abstract This report suggests that an electron energy-loss spectroscopy technique under low beam intensity is useful for beam-sensitive materials. High quality ‘damage-free’ Ge M 45 edge near-edge structure can be obtained using this method in rutile-GeO 2 , which is susceptible to high-energy electron beam damage. Both experimental and theoretical results indicate that the Ge M 45 edge ELNES can be used to distinguish fourfold and sixfold coordinated Ge.