XANES study on coordination geometry of implanted Cu+ ions in silica glass: dependence on doses

Abstract The coordination structure of Cu atoms has been studied in Cu + -ion-implanted glasses and (O + + Cu + )-ion-implanted glasses at doses from 1 × 10 16 to 1 × 10 17 Cu + ions/cm 2 and from 5 × 10 15 to 5 × 10 16 O + ions/cm 2 . It was found that Cu atoms were present as Cu(I) and their coordination geometry depended on dose through the concentration of oxygen deficiency per silicon atom.