journal article·2008-09

The effect of thermal annealing on the structural and mechanical properties of a-C:H thin films prepared by the CFUBM magnetron sputtering method

Yong Seob Park, Byungyou Hong

Journal of Non-Crystalline Solids· Volume 354· Issue 33
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · High-pressure geophysics and materials

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References (19)

Show source-provided references
1. Liu · Surf. Coat. Technol. · 2003 · 172 · 19410.1016/S0257-8972(03)00338-4 ↗
2. Peng · Surf. Coat. Technol. · 2001 · 138 · 2310.1016/S0257-8972(00)01139-7 ↗
3. Sheeja · Wear · 2001 · 249 · 43310.1016/S0043-1648(01)00541-5 ↗
4. Kulikovsky · Diam. Relat. Mater. · 2001 · 10 · 107610.1016/S0925-9635(00)00525-2 ↗
5. Li · Thin Solid Films · 2006 · 515 · 215310.1016/j.tsf.2006.04.018 ↗
6. Conway · Diam. Relat. Mater. · 2000 · 9 · 76510.1016/S0925-9635(99)00271-X ↗
7. Benlahsen · J. Non-Cryst. Solids · 2000 · 266–269 · 78310.1016/S0022-3093(99)00815-7 ↗
8. Onoprienko · Surf. Coat. Technol. · 2003 · 172 · 18910.1016/S0257-8972(03)00333-5 ↗
9. Kulikovsky · Thin Solid Films · 2004 · 447&448 · 22310.1016/S0040-6090(03)01060-5 ↗
10. Ferrari · Phys. Rev. B · 2000 · 61 · 1409510.1103/PhysRevB.61.14095 ↗
11. Kalish · Appl. Phys. Lett. · 1999 · 74 · 293610.1063/1.123971 ↗
12. Piazza · Appl. Phys. Lett. · 2003 · 82 · 35810.1063/1.1538349 ↗
13. Ferrari · J. Appl. Phys. · 1999 · 85 · 719110.1063/1.370531 ↗
14. Wachter · Diam. Relat. Mater. · 1999 · 8 · 50410.1016/S0925-9635(98)00395-1 ↗
15. Dillon · Phys. Rev. B · 1984 · 29 · 348210.1103/PhysRevB.29.3482 ↗
16. Tang · J. Appl. Phys. · 2001 · 89 · 1956
17. Lifshitz · Phys. Rev. Lett. · 1994 · 72 · 275310.1103/PhysRevLett.72.2753 ↗
18. Takadoum · Surf. Coat. Technol. · 2003 · 174&175 · 42710.1016/S0257-8972(03)00542-5 ↗
19. Knight · Surf. Coat. Technol. · 1991 · 49 · 51910.1016/0257-8972(91)90111-9 ↗