Growth kinetics of amorphous and microcrystalline silicon studied by using radical beam
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (5)
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1. Chemical Reactions in Plasma Deposition
2. Hirose · 1984 · 213
3. Miyazaki · 1984 · 447
4. Turban · Thin Solid Films · 1980 · 67 · 30910.1016/0040-6090(80)90464-2 ↗
5. Hamasaki · Appl. Phys. Lett. · 1984 · 37 · 108410.1063/1.91872 ↗