Silane glow discharge: Trapping of the free radicals in solid argon
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OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Ion-surface interactions and analysis
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References (7)
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2. Turban · Thin Solid Films · 1980 · 67 · 30910.1016/0040-6090(80)90464-2 ↗
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5. Milligan · J. Chem. Phys. · 1970 · 52 · 259410.1063/1.1673347 ↗
6. Dubost · Chem. Phys. Lett. · 1972 · 17 · 26910.1016/0009-2614(72)87071-4 ↗
7. Perrin · Chem. Phys. · 1982 · 73 · 38310.1016/0301-0104(82)85177-X ↗