a-Si:H/c-Si heterostructures prepared by 55 kHz glow discharge high-rate deposition technique
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (11)
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1. Budaguan · MRS Symp. Pros. · 1996 · 426 · 3110.1557/PROC-426-31 ↗
2. J. Perrin, Plasma Deposition of Amorphous Silicon-Based Materials, in: G. Bruno, P. Capezzuto, A. Madan (Eds.), Academic Press, San Diego, 1995, pp. 177–241.10.1016/B978-012137940-7/50005-X ↗
3. T. Sawada, N. Terada, S. Tsuge, T. Bata, T. Takahama, K. Wakisaka, S. Tsuda, S. Nakano, Proc. 1st World Conf. on Photov. Energy Conv., December 1994, HI.10.1109/WCPEC.1994.519952 ↗
4. Mimura · J. Appl. Phys. · 1987 · 61 · 257510.1063/1.337935 ↗
5. Mimura · Appl. Surf. Sci. · 1991 · 48/49 · 47210.1016/0169-4332(91)90377-V ↗
6. Harris · J. Appl. Phys. · 1980 · 51 · 428710.1063/1.328246 ↗
7. S.M. Sze, Physics of Semiconductor Devices. 2nd edn., Wiley-Interscience, New York, 1981.
8. D. della Sala P. Grillo, S. Parisi, G. Di Francia, F. Roca, Proc. 13th European Photov. Sol. Energy Conf., October 1995, Nice, pp. 906–909.
9. Drevillon · J. Appl. Phys. · 1985 · 58 · 53810.1063/1.335658 ↗
10. Greene · J. Vac. Sci. Technol. · 1982 · 21 · 28510.1116/1.571767 ↗
11. Sasaki · J. Appl. Phys. · 1982 · 53 · 101310.1063/1.330510 ↗