Deposition of amorphous silicon nitride thin films by CO2 laser-induced chemical vapour deposition
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Abstract
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Research context
OpenAlex topics: Laser Material Processing Techniques · Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies
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References (11)
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8. Fernández · J. Vac. Sci. Technol. · 1994 · A12 · 1
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10. Lucovsky · J. Vac. Sci. Technol. · 1987 · A5 · 223110.1116/1.574963 ↗
11. Budhani · J. Vac. Sci. Technol. · 1987 · A5 · 164410.1116/1.574538 ↗