journal article·1996-05

Bonding structures in highly photoconductive a-SiC:H films deposited by hybrid-plasma chemical vapor deposition

Tadashi Fujii, Masahiro Yoshimoto, Takashi Fuyuki, Hiroyuki Matsunami

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Copper Interconnects and Reliability

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References (8)

Show source-provided references
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5. Matsuda · J. Non-Cryst. Solids · 1987 · 97&98 · 136710.1016/0022-3093(87)90328-0 ↗
6. Beyer · Appl. Phys. Lett. · 1989 · 54 · 166610.1063/1.101412 ↗
7. Wieder · Phys. Status Solidi · 1979 · b)92 · 9910.1002/pssb.2220920112 ↗
8. Brodsky · Phys. Rev. · 1977 · B16 · 3565