Structural relaxation in sputter-deposited silica glass
Source abstract
Abstract
Abstract We investigated structural relaxation below the glass transition temperature in sputter-deposited silica glass. Structural relaxation was obtained from annealing behavior of the IR reflection structural band position. Results were compared with that of bulk silica glass. Results showed the following. (1) The structural relaxation time is 106 times shorter than that of bulk silica glass. (2) The activation energy is close to that of bulk silica glass. (3) Once the structural relaxation reaches a steady state, the structure of silica glass film resembles that of bulk silica glass.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Glass properties and applications · Luminescence Properties of Advanced Materials · Mineralogy and Gemology Studies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (28)
Show source-provided references
1. Chabal · 2001
2. Thornton · 1994
3. Sakka · 1982 · 129
4. Martinu · J. Vac. Sci. Technol. A · 2000 · 18 · 261910.1116/1.1314395 ↗
5. Pulker · 1984
6. Bach · 1997
7. Devine · Appl. Phys. Lett. · 1993 · 63 · 61910.1063/1.109968 ↗
8. Lefevre · Phys. Rev. B · 2001 · 64 · 11542910.1103/PhysRevB.64.115429 ↗
9. Agarwal · J. Non-Cryst. Solids · 1997 · 209 · 26410.1016/S0022-3093(96)00570-4 ↗
10. Saito · J. Appl. Phys. · 1997 · 81 · 712910.1063/1.365309 ↗
11. Varshneya · 1982 · 241
12. Scherer · 1992
13. Brunet-Bruneau · J. Appl. Phys. · 1997 · 82 · 133010.1063/1.365906 ↗
14. Yeh · J. Appl. Phys. · 1998 · 83 · 110710.1063/1.366801 ↗
15. Takahashi · J. Appl. Phys. · 1996 · 79 · 278710.1063/1.361111 ↗
16. Ohwaki · Appl. Phys. Lett. · 1989 · 55 · 83710.1063/1.101575 ↗
17. Choi · J. Appl. Phys. · 1998 · 83 · 230810.1063/1.366974 ↗
18. Agarwal · J. Non-Cryst. Solids · 1995 · 185 · 19110.1016/0022-3093(94)00676-8 ↗
19. Hosono · J. Non-Cryst. Solids · 1994 · 179 · 3910.1016/0022-3093(94)90683-1 ↗
20. Saito · J. Non-Cryst. Solids · 1999 · 259 · 8110.1016/S0022-3093(99)00499-8 ↗
21. Lehmann · Phys. Status Solidi B · 1983 · 117 · 68910.1002/pssb.2221170231 ↗
22. Ishikawa · J. Appl. Phys. · 2000 · 88 · 715010.1063/1.1325377 ↗
23. Bianchini · Glastech. Ber. · 1991 · 64 · 205
24. Tan · Physica B · 1998 · 252 · 2810.1016/S0921-4526(98)00051-9 ↗
25. Brawer · 1985
26. Hirose · J. Non-Cryst. Solids · 2006 · 352 · 66410.1016/j.jnoncrysol.2005.11.050 ↗
27. Doremus · J. Appl. Phys. · 2002 · 92 · 761910.1063/1.1515132 ↗
28. Tomozawa · J. Non-Cryst. Solid · 2004 · 345&346 · 44910.1016/j.jnoncrysol.2004.08.065 ↗