X-ray absorption study of tantalum oxide films on silicon
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (16)
Show source-provided references
1. Harrop · Thin Solid Films · 1968 · 2 · 27310.1016/0040-6090(68)90034-5 ↗
2. Revesz · J. Non-Crystalline Solids · 1972 · 7 · 43510.1016/0022-3093(72)90278-5 ↗
3. Revesz · COMSAT Tech. Rev. · 1973 · 3 · 449
4. Lee · Rev. Mod. Phys. · 1981 · 53 · 76910.1103/RevModPhys.53.769 ↗
5. Durham · Solid St. Comm. · 1981 · 38 · 15910.1016/0038-1098(81)90811-5 ↗
6. Stephenson · Acta Cryst. · 1971 · B27 · 103710.1107/S056774087100342X ↗
7. Roth · Prog. Sol. St. Chem. · 1980 · 13 · 15910.1016/0079-6786(80)90003-5 ↗
8. Hyde · Ann. Rev. Mat. Sci. · 1974 · 4 · 8110.1146/annurev.ms.04.080174.000355 ↗
9. Brown · Phys. Rev. · 1977 · B15 · 73810.1103/PhysRevB.15.738 ↗
10. Rao · J. Chem. Phys. · 1983 · 78 · 622810.1063/1.444587 ↗
11. Wemple · J. Chem. Phys. · 1977 · 67 · 215110.1063/1.435102 ↗
12. Revesz · J. de Phys. (Paris) · 1982 · 43 · C910.1051/jphyscol:1982956 ↗
13. Teo · J. Am. Chem. Soc. · 1979 · 101 · 281510.1021/ja00505a003 ↗
14. Nassau · Bell Systems Tech. J. · 1981 · 60 · 32710.1002/j.1538-7305.1981.tb00244.x ↗
15. Frova · Appl. Phys. Lett. · 1969 · 15 · 40610.1063/1.1652879 ↗
16. Revesz · Oxidation Met. · 1981 · 15 · 29710.1007/BF01058831 ↗