journal article·1998-05

Insights into surface reactions during a-SiGe:H deposition and hydrogen plasma annealing as obtained from infrared attenuated total reflection spectroscopy

K Nakagawa, Y Yoshida, S Miyazaki, M Hirose

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

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References (17)

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