Microwave plasma assisted sputtering
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Abstract
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Research context
OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Transition Metal Oxide Nanomaterials
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References (8)
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2. Latz · 1993 · 93
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5. Ray · J. Appl. Phys. · 1983 · 54 · 349710.1063/1.332415 ↗
6. S. Ishibashi, K. Nakamura, Y. Higuchi, T. Komatsu, Y. Murata, Y. Ota, US patent 5,180,476 (1993).
7. Geisler · J. Vac. Sci. Technol. · 1990 · A8 · 90810.1116/1.576895 ↗
8. Szczyrbowski · Thin Solid Films · 1986 · 137 · 16910.1016/0040-6090(86)90017-9 ↗