A comparative study on structural and electronic properties of PECVD a-SiOx with a-SiNx

journal article·1995-07

Keiji Maeda, Naomichi Sakamoto, Ikurou Umezu

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices

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Show source-provided references

1. Maeda · J. Appl. Phys. · 1991 · 70 · 274510.1063/1.350352 ↗

2. Tsu · Phys. Rev. · 1989 · B40 · 179510.1103/PhysRevB.40.1795 ↗

3. Hasegawa · Phys. Rev. · 1992 · B46 · 1247810.1103/PhysRevB.46.12478 ↗

4. Shimaoka · Appl. Surf. Sci. · 1988 · 33 & 34 · 78410.1016/0169-4332(88)90381-9 ↗