Low temperature fabrication of poly-Si TFT by laser induced crystallization of a-Si
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Laser Material Processing Techniques · Silicon Nanostructures and Photoluminescence
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References (7)
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2. Mimura · IEDM Tech. Dig. · 1987 · 436
3. Hatalis · IEEE Electron Device Lett. · 1987 · vol. EDL-8 · 36110.1109/EDL.1987.26660 ↗
4. Nishimura · SID Dig. · 1982 · 36
5. Fan · Appl. Phys. Lett. · 1980 · vol. 36 · 15810.1063/1.91414 ↗
6. Morin · 1981 · 206
7. Yuki · IEEE Trans. on Electron Devices · 1989