Effect of hydrogen radicals on properties and structure of a-Si1−C :H films

journal article·1998-05

Akimori Tabata, Hirotaka Kamijo, Yasuo Suzuoki, Teruyoshi Mizutani

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No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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