journal article·2006-01

Preferential coalescence of nanocrystalline silicon on different film substrates

C.Y. Lin, Y.K. Fang, S.F. Chen, C.S. Lin, T.H. Chou, S.B. Hwang, J.S. Hwang, K.I. Lin

Journal of Non-Crystalline Solids· Volume 352· Issue 1
Publisher page

Abstract

The characteristics of nanocrystalline silicon deposited on different film substrates were studied. Through atomic force microscopy, field emission scanning electron microscopy, Raman scattering and Hall effect measurements, we investigated and compared the morphology, columnar grain size, crystallinity and Hall mobility of nanocrystalline silicon on different film substrates. The mechanisms affecting the characteristics of nanocrystalline silicon deposited to different substrates were studied in detail.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (17)

Show source-provided references
1. Veprek · Solid State Electron. · 1968 · 11 · 68310.1016/0038-1101(68)90071-3 ↗
2. Fukuda · Appl. Phys. Lett. · 1997 · 70 · 229110.1063/1.118816 ↗
3. Tan · J. Appl. Phys. · 2003 · 94 · 63310.1063/1.1569994 ↗
4. Tiwari · Appl. Phys. Lett. · 1996 · 68 · 137710.1063/1.116085 ↗
5. Lin · J. Electron. Mater. · 2005 · 34 · 112310.1007/s11664-005-0240-0 ↗
6. Mazen · Microelectron. Eng. · 2004 · 73&74 · 63210.1016/S0167-9317(04)00173-X ↗
7. Baron · J. Cryst. Growth · 2000 · 209 · 100410.1016/S0022-0248(99)00742-3 ↗
8. Guliants · J. Appl. Phys. · 2001 · 89 · 464810.1063/1.1359150 ↗
9. Elements of X-ray Diffraction
10. Kaneko · Appl. Phys. Lett. · 1994 · 64 · 186510.1063/1.111781 ↗
11. Itoh · J. Non-Cryst. Solids · 2000 · 266 · 20110.1016/S0022-3093(99)00821-2 ↗
12. Alpuim · J. Appl. Phys. · 1999 · 86 · 381210.1063/1.371292 ↗
13. He · J. Appl. Phys. · 1994 · 75 · 79710.1063/1.356432 ↗
14. He · J. Appl. Phys. · 1997 · 82 · 340810.1063/1.365656 ↗
15. Howe · J. Appl. Phys. · 1983 · 54 · 467410.1063/1.332628 ↗
16. Sze · 1988
17. Roca i Cabarrocas · Solis State Phenom. · 2003 · 93 · 25710.4028/www.scientific.net/SSP.93.257 ↗