Large area deposition of ITO films by cluster type sputtering system
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Abstract
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Research context
OpenAlex topics: Surface Roughness and Optical Measurements · Advanced Sensor Technologies Research · Semiconductor materials and devices
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References (8)
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2. Ishibashi · Thin Solid Films · 1996 · 281&282 · 19810.1016/0040-6090(96)08612-9 ↗
3. Shigesato · Appl. Phys. Lett. · 1992 · 61 · 7310.1063/1.107673 ↗
4. Kitahara · 1991 · 149
5. Song · 1996 · 131
6. Ishibashi · J. Vac. Sci. Technol. · 1992 · A10 · 171810.1116/1.577776 ↗
7. Hoffman · J. Vac. Sci. Technol. · 1990 · A8 · 3703
8. Somekh · J. Vac. Sci. Technol. · 1984 · A2 · 128510.1116/1.572396 ↗