journal article·1999-11

Oxygen related defect center formation in MeV energy boron implanted silica

R.H. Magruder III, R.A. Weeks, R.A. Weller, R.A. Zuhr, D.K. Hensley

Journal of Non-Crystalline Solids· Volume 259· Issue 1-3
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OpenAlex topics: Ion-surface interactions and analysis · Glass properties and applications · Integrated Circuits and Semiconductor Failure Analysis

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