Silicon oxynitride study by the tetrahedron model and by spectroscopic ellipsometry
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OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Diamond and Carbon-based Materials Research
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References (8)
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6. Sassella · Phys. Rev. · 1993 · B48 · 1420810.1103/PhysRevB.48.14208 ↗
7. Borghesi · Thin Solid Films · 1993 · 233 · 22710.1016/0040-6090(93)90096-8 ↗
8. Bruggeman · Ann. Phys. (Leipzig) · 1935 · 24 · 63610.1002/andp.19354160705 ↗