High-conductivity a-Si:H:F film and its performance for a power sensor and a strain gauge
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Abstract
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Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Thin-Film Transistor Technologies · Advanced Fiber Optic Sensors
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References (2)
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1. Kodato · 1982 · 185
2. Jones · Phil. Mag. · 1977 · 36 · 54110.1080/14786437708239738 ↗