New micro-optical devices for the IR based on three-component amorphous chalcogenide photoresists

Abstract New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As–S–Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.