Influence on the transport properties of the deposition temperature of a-Si:H films deposited from mixtures of silane in helium at high deposition rates
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (7)
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7. Murayama · Solid State Commun. · 1992 · 81 · 88710.1016/0038-1098(92)90862-4 ↗