Optical contrast formation in a-Si1−C :H films by ion implantation
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (6)
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3. Aspley · J. Non-Cryst. Solids · 1979 · 32 · 7110.1016/0022-3093(79)90065-6 ↗
4. Tsvetkova · Phys. Stat. Sol. · 1990 · 119 · 10710.1002/pssa.2211190113 ↗
5. Demichelis · Phys. Rev. · 1988 · B37 · 123110.1103/PhysRevB.37.1231 ↗
6. Tzenov · Nucl. Instr. Meth. in Phys. Res. B · 1993