Excimer laser treatment for large surface
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Abstract
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Research context
OpenAlex topics: Laser Material Processing Techniques · Thin-Film Transistor Technologies · Surface Roughness and Optical Measurements
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References (4)
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1. Realization of a 1 kW XeCl Laser, GCL'92
2. VEL 15, Second Generation of SOPRA's VEL industrial Excimer Laser, energy up to 20 J
3. 60 J XeCl laser for Single Shot Excimer Laser Annealing
4. Excimer Laser Annealing of Amorphous Silicon: Optimization and relation to the electrical properties of the polysilicon