journal article·1996-05

Light-soaking in a-SiC:H films grown by PECVD in undiluted and hydrogen diluted SiH4 + CH4 gas mixtures

M. Fathallah, R. Gharbi, G. Crovini, F. Demichelis, F. Giorgis, C.F. Pirri, E. Tresso, P. Rava

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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References (24)

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