journal article·1998-05

Structural and electrical anisotropy and high absorption in poly-Si films prepared by catalytic chemical vapor deposition

Atsushi Masuda, Ritsuko Iiduka, Akira Heya, Chisato Niikura, Hideki Matsumura

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices

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References (12)

Show source-provided references
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