Studies of the deposition of high quality N-rich amorphous silicon nitride films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence
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References (10)
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2. Yin · J. Non-Cryst. Solids · 1989 · 114 · 48910.1016/0022-3093(89)90626-1 ↗
3. Phys. Rev. B · 1990 · 42 · 366610.1103/PhysRevB.42.3666 ↗
4. Yin · Phys. Rev. B · 1991 · 43 · 450710.1103/PhysRevB.43.4507 ↗
5. J. Vac. Sci. Technol. A · 1991 · 9 · 97210.1116/1.577558 ↗
6. Robertson · Phil. Mag. B · 1991 · 63 · 4710.1080/01418639108224430 ↗
7. Yin · Phys. Rev. B · 1990 · 42 · 365810.1103/PhysRevB.42.3658 ↗
8. Hasegawa · Appl. Phys. Lett. · 1991 · 58 · 74110.1063/1.104533 ↗
9. Stewart · Phil. Mag. B · 1988 · 57 · 43110.1080/13642818808208515 ↗
10. J. Robertson (private communication).