Anomalous grain boundary and carrier transport in cat-CVD poly-Si films
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (8)
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5. Matsumura · J. Appl. Phys. · 1989 · 65 · 439610.1063/1.343278 ↗
6. Matsumura · Jpn. J. Appl. Phys. · 1991 · 30 · L152210.1143/JJAP.30.L1522 ↗
7. Matsumura · Mater. Res. Soc. Symp. Proc. · 1994 · 336 · 3710.1557/PROC-336-37 ↗
8. T. Kamins, Polycrystalline Silicon for Integrated Circuit Applications, Chap. 5, Kluwer Academic Publishers, Boston, 1988.10.1007/978-1-4613-1681-7 ↗