High rate deposition of μc-Si with plasma gun CVD
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research · Thin-Film Transistor Technologies
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References (8)
Show source-provided references
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3. Tsui · 1990 · Vol. 192 · 475
4. Ogino · J. Non-Cryst. Solids · 1994 · 178 · 21510.1016/0022-3093(94)90287-9 ↗
5. Uramoto · 1980
6. Uramoto · Shinku · 1982 · 25 · 71910.3131/jvsj.25.719 ↗
7. Shirafuji · Shinku · 1994 · 37 · 87510.3131/jvsj.37.875 ↗
8. Shirai · 1994 · 641