Photoconductivity and optical stability of intrinsic μc-Si films formed by remote plasma-enhanced chemical-vapor deposition, remote pecvd
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OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and interfaces · Silicon Nanostructures and Photoluminescence
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References (9)
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8. LeComber · J. Non-Cryst. Solids · 1983 · 59&60 · 79510.1016/0022-3093(83)90290-9 ↗
9. LeComber · 1979 · 251