Differences between direct and remote plasma enhanced CVD
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Abstract
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Research context
OpenAlex topics: Organic Light-Emitting Diodes Research · Plasma Diagnostics and Applications · Semiconductor materials and devices
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References (7)
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3. Rudder · J Vac Sci Technol A · 1985 · 3 · 56710.1116/1.572995 ↗
4. Balamuta · J Chem Phys · 1983 · 79 · 282210.1063/1.446103 ↗
5. GN Parsons, DV Tsu and G Lucovsky, these proceedings.
6. DV Tsu and G Lucovsky, these proceedings.
7. Toyoshima · Appl Phys Lett · 1985 · 46 · 58410.1063/1.95914 ↗