Substrate temperature dependence of the growth kinetics and opto-electronic properties of a-Si:H films deposited by RF glow discharge
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (11)
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10. A. Gallagher, D.A. Doughty and J.R. Doyle, Proc. of the 1989 Amorphous Silicon Subcontractors' Review Meeting, SERI, June 19–20, Goloden, Colorado.
11. Asano · J. of Non-Cryst. Solids · 1987 · 94 · 510.1016/S0022-3093(87)80254-5 ↗