Densification and porosity in low-temperature-deposited oxide
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (16)
Show source-provided references
1. Batey · J. Appl. Phys. · 1986 · 60 · 313610.1063/1.337726 ↗
2. Batey · IEEE Electron. Dev. Lett. EDL-8 · 1987 · 14810.1109/EDL.1987.26583 ↗
3. Warren · Appl. Phys. Lett. · 1988 · 53 · 48210.1063/1.100617 ↗
4. Feigl · Sol. St. Commun. · 1974 · 14 · 22510.1016/0038-1098(74)90840-0 ↗
5. Devine · Phys. Rev. · 1987 · B53 · 937610.1103/PhysRevB.35.9376 ↗
6. Devine · Phys. Rev. · 1989 · B39 · 513210.1103/PhysRevB.39.5132 ↗
7. Dong · J. Electrochem. Soc. · 1978 · 125 · 81910.1149/1.2131555 ↗
8. Galeener · Phys. Rev. · 1983 · B27 · 105210.1103/PhysRevB.27.1052 ↗
9. Lehmann · phys. stat. sol. · 1983 · 117 · 68910.1002/pssb.2221170231 ↗
10. Ferrieu · J. Sci. Inst.
11. Devine · Sci. Technol. · 1988 · A6 · 3154
12. Arndt · Phys. Chem. Glasses · 1969 · 10 · 117
13. Denisse · J. Appl. Phys. · 1986 · 60 · 253610.1063/1.337117 ↗
14. Mozzi · J. Appl. Cryst. · 1969 · 2 · 16410.1107/S0021889869006868 ↗
15. Levien · Amer. Mineral. · 1980 · 65 · 920
16. Gaskell · Phil. Mag. · 1980 · B42 · 26510.1080/01418638008227285 ↗