Dielectric and high Tc superconductor applications of sol-gel and modified sol-gel processing to microelectronics technology
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OpenAlex topics: Physics of Superconductivity and Magnetism · Copper Interconnects and Reliability · Inorganic Fluorides and Related Compounds
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References (21)
Show source-provided references
1. Schmidt · 1984 · 327
2. Introduction to Microlithography10.1021/bk-1983-0219.ch006 ↗
3. Gupta · 1988 · 275
4. Yarbrough · Ceram. Bull. · 1987 · 66 · 692
5. Bagley · 1987 · 35
6. Bagley · Polym. Eng. Sci. · 1989 · 29 · 119710.1002/pen.760291711 ↗
7. W.J. Crosby, OI-NEG, Toledo, OH 43666, private communication.
8. Bagley · 1984 · 287
9. B.G. Bagley, W.E. Quinn and C.C. Chang, J. Mater. Res., submitted.
10. Butherus · J. Vac. Sci. Technol. · 1985 · B3 · 135210.1116/1.582992 ↗
11. Bagley · Mater. Lett. · 1986 · 4 · 15410.1016/0167-577X(86)90007-8 ↗
12. Bednorz · Z. Phys. · 1986 · B64 · 18910.1007/BF01303701 ↗
13. Wu · Phys. Rev. Lett. · 1987 · 68 · 90810.1103/PhysRevLett.58.908 ↗
14. Barboux · J. Appl. Phys. · 1988 · 63 · 272510.1063/1.340967 ↗
15. Barboux · 1988 · 49
16. Sakka · J. Ceram. Soc. Jpn. · 1988 · 96 · 46810.2109/jcersj.96.468 ↗
17. Kordas · Mater. Lett. · 1987 · 5 · 41710.1016/0167-577X(87)90053-X ↗
18. Uchikawa · Mater. Res. Soc. Ext. Abs. · 1988 · EA15 · 89
19. Khan · J. Non-Cryst. Solids · 1989 · 110 · 14210.1016/0022-3093(89)90250-0 ↗
20. Khan · 1989 · 95
21. Khan · Appl. Phys. Lett. · 1988 · 53 · 70010.1063/1.100645 ↗