Glow discharge optical spectroscopy measurement of dopant concentrations in a-Si:H
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (11)
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2. Greene · J. Appl. Phys. · 1973 · 44 · 250910.1063/1.1662605 ↗
3. Greene · Appl. Phys. Lett. · 1974 · 25 · 43510.1063/1.1655538 ↗
4. Greene · J. Appl. Phys. · 1975 · 46 · 270110.1063/1.321906 ↗
5. Glow Discharge Optical Spectroscopy for Measurement of Boron Implanted Distributions in Silicon
6. Comas · J. Appl. Phys. · 1967 · 38 · 295610.1063/1.1710031 ↗
7. Canghey · 1967 · 55 · 2192
8. Wagner · J. Electrochem. Soc. · 1972 · 119 · 157010.1149/1.2404044 ↗
9. Thurber · 1978 · 81
10. Gibbons · 1975
11. Street · Phys. Rev. B · 1978 · 18 · 188010.1103/PhysRevB.18.1880 ↗