Mechanical stress in thin SiO2 and Ta2O5 films produced by reactive-low-voltage-ion-plating (RLVIP)
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Ion-surface interactions and analysis
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References (8)
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7. Lindinger · Pure Appl. Chem. · 1985 · 57 · 122310.1351/pac198557091223 ↗
8. Pulker · J. Vac. Sci. Technol. · 1992 · A10 · 166910.1116/1.577767 ↗