H+ and D+ associated charge buildup during annealing of Si/SiO2/Si structures
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Ion-surface interactions and analysis · Silicon Nanostructures and Photoluminescence
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References (8)
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7. Saks · IEEE Trans. Nucl. Sci. · 1992 · 39 · 222010.1109/23.211424 ↗
8. Electrical Characterisation of Silicon on Insulator Materials and Devices