A study of electronic states in a-SiOx and a-SiNx thin films by infrared, auger electron and X-ray photoelectron spectroscopies

journal article·1985-12

S.S. Chao, G. Lucovsky, S.Y. Lin, C.K. Wong, P.D. Richard, D.V. Tsu, Y. Takagi, J.E. Keem, J.E. Tyler, P. Pai

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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Ga2O3 and related materials · Advanced Electron Microscopy Techniques and Applications

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7. Shirley · Phys. Rev. A · 1973 · 7 · 152010.1103/PhysRevA.7.1520 ↗

8. Lucovsky · J. Vac. Sci. Tech. B · 1985 · 3 · 112210.1116/1.583066 ↗