Photosensitive amorphous silicon films deposited from hexafluorodisilane
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Advanced Surface Polishing Techniques
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References (3)
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1. Sato · Appl. Phys. Lett. · 1984 · 45 · 132410.1063/1.95108 ↗
2. A. Matsuda, et al., Jpn. J. Appl. Phys. 23, L 57610.1143/JJAP.23.L576 ↗
3. Koinuma · Tech. Digest of Int'l PVSEC-1 (Kobe, Japan) · 1984 · 743