New way for high-rate a-Si deposition
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Optical Coatings and Gratings
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References (4)
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1. Vepřek · Thin Solid Films · 1985 · 130 · 13510.1016/0040-6090(85)90303-7 ↗
2. Hamasaki · Appl. Phys. Lett. · 1984 · 44 · 60010.1063/1.94841 ↗
3. High-rate Jet PACVD
4. New low-pressure rf plasma jet