High quality a-Si:H films and interfaces prepared by VHF plasma CVD
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Surface Roughness and Optical Measurements
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References (8)
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1. Curtins · 1987 · 95 · 249
2. Oda · 1988 · 118 · 117
3. Chatham · 1989
4. Oda · Jpn. J. Appl. Phys. · 1989 · 28 · L186010.1143/JJAP.28.L1860 ↗
5. Oda · Jpn. J. Appl. Phys. · 1990 · 29 · 188910.1143/JJAP.29.1889 ↗
6. Yasukawa · 1991 · 277
7. Ernie · 1991 · 437
8. Graves · 1991 · 433