A new hydro-fluorinated amorphous silicon produced by using intermediate species SiF2
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Abstract
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (7)
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4. Weil · 1981 · 1981 · C4.643
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6. Madan · Phil. Mag. · 1979 · B-40 · 25910.1080/01418637908227166 ↗
7. Matsumura · Jpn. J. Appl. Phys. Suppl. · 1983 · 22-1 · 52310.7567/JJAPS.22S1.523 ↗